Name: Silicon Oxide Sputtering Target
CAS: 7631-86-9
EC Number: 231-545-4
Chemical Formular: O2Si
Appearance: Whitish Yellow target
Molecular Weight: 60.083 g/mol
Melting Point: 1,713 °C (3,115 °F; 1,986 K)
Boiling Point: 2,950 °C (5,340 °F; 3,220 K)
Density: 2.648 g/cm3
Solubility in water: n/a
Exact Mass: 59.967 g/mol
Monoisotopic Mass: 59.967 g/mol
Topological Polar Surface Area: 34.1 A^2
Complexity: 18.3

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MATERIAL SAFETY DATA SHEETS

According to the UN GHS revision 8

Version: 1.0

Creation Date: Oct 16, 2020

Revision Date: Oct 16, 2020

SECTION 1: Identification


1.1

GHS Product identifier

Product name

Silicon Oxide Sputtering Target


1.2

Other means of identification

Product number

Other names


1.3

Recommended use of the chemical and restrictions on use

Identified uses

Industrial and scientific research uses.

Uses advised against

no data available


1.4

Supplier’s details

Company

Elements China Limited

Address

Building 2, No.5555, Shenzhuan Hwy, Shanghai , China

Telephone

+86-021-3776-2181

1.5Emergency phone number

Emergency phone number

+86-021-3776-2181

Service hours

Monday to Friday, 9am-5pm (Standard time zone: UTC/GMT +8 hours).

SECTION 2: Hazard identification


2.1

Classification of the substance or mixture

Not classified.


2.2

GHS label elements, including precautionary statements

Pictogram(s)No symbol.
Signal word

No signal word

Hazard statement(s)

none

Precautionary statement(s)
Prevention

none

Response

none

Storage

none

Disposal

none


2.3

Other hazards which do not result in classification

no data available

SECTION 3: Composition/information on ingredients


3.1

Substances

Chemical nameCommon names and synonymsCAS numberEC number
Silicon Oxide Sputtering Target7631-86-9231-545-4

SECTION 4: First-aid measures


4.1

Description of necessary first-aid measures

If inhaled

Move the victim into fresh air. If breathing is difficult, give oxygen. If not breathing, give artificial respiration and consult a doctor immediately. Do not use mouth to mouth resuscitation if the victim ingested or inhaled the chemical.

Following skin contact

Take off contaminated clothing immediately. Wash off with soap and plenty of water. Consult a doctor.

Following eye contact

Rinse with pure water for at least 15 minutes. Consult a doctor.

Following ingestion

Rinse mouth with water. Do not induce vomiting. Never give anything by mouth to an unconscious person. Call a doctor or Poison Control Center immediately.


4.2

Most important symptoms/effects, acute and delayed

no data available


4.3

Indication of immediate medical attention and special treatment needed, if necessary

no data available

SECTION 5: Fire-fighting measures


5.1

Suitable extinguishing media

Use dry chemical, carbon dioxide or alcohol-resistant foam.


5.2

Specific hazards arising from the chemical

no data available


5.3

Special protective actions for fire-fighters

Wear self-contained breathing apparatus for firefighting if necessary.

SECTION 6: Accidental release measures


6.1

Personal precautions, protective equipment and emergency procedures

Avoid dust formation. Avoid breathing mist, gas or vapours.Avoid contacting with skin and eye. Use personal protective equipment.Wear chemical impermeable gloves. Ensure adequate ventilation.Remove all sources of ignition. Evacuate personnel to safe areas.Keep people away from and upwind of spill/leak.


6.2

Environmental precautions

Prevent further spillage or leakage if it is safe to do so. Do not let the chemical enter drains. Discharge into the environment must be avoided.


6.3

Methods and materials for containment and cleaning up

Collect and arrange disposal. Keep the chemical in suitable and closed containers for disposal. Remove all sources of ignition. Use spark-proof tools and explosion-proof equipment. Adhered or collected material should be promptly disposed of, in accordance with appropriate laws and regulations.

SECTION 7: Handling and storage


7.1

Precautions for safe handling

Handling in a well ventilated place.
Wear suitable protective clothing.
Avoid contact with skin and eyes.
Avoid formation of dust and aerosols.
Use non-sparking tools.
Prevent fire caused by electrostatic discharge steam.


7.2

Conditions for safe storage, including any incompatibilities

Store the container tightly closed in a dry, cool and well-ventilated place. Store apart from foodstuff containers or incompatible materials.

SECTION 8: Exposure controls/personal protection


8.1

Control parameters

Occupational Exposure limit values

no data available

Biological limit values

no data available


8.2

Appropriate engineering controls

Ensure adequate ventilation.
Handle in accordance with good industrial hygiene and safety practice.
Set up emergency exits and the risk-elimination area.

8.3Individual protection measures, such as personal protective equipment (PPE)

Eye/face protection

Wear tightly fitting safety goggles with side-shields conforming to EN 166(EU) or NIOSH (US).

Skin protection

Wear fire/flame resistant and impervious clothing. Handle with gloves. Gloves must be inspected prior to use. Wash and dry hands. The selected protective gloves have to satisfy the specifications of EU Directive 89/686/EEC and the standard EN 374 derived from it.

Respiratory protection

If the exposure limits are exceeded, irritation or other symptoms are experienced, use a full-face respirator.

Thermal hazards

no data available

SECTION 9: Physical and chemical properties and safety characteristics

Physical state

Solid.

Colour

White.

Odour

no data available

Melting point/freezing point

1 713 °C.

Boiling point or initial boiling point and boiling range

> 1 700 °C.

Flammability

no data available

Lower and upper explosion limit/flammability limit

no data available

Flash point

102°C(lit.)

Auto-ignition temperature

no data available

Decomposition temperature

no data available

pH

>= 3.7 – <= 4.7. Remarks:Range of various Aerosil types (Degussa).;>= 3.6 – <= 4.5. Remarks:"pyrogenic" acc. to ECETOC 2006.

Kinematic viscosity

no data available

Solubility

In water: Ca. 76 mg/L. Temperature:37 °C. pH:7.4.;Ca. 110 – ca. 166 mg/L. Temperature:37 °C. pH:7.1 – 7.4.

Partition coefficient n-octanol/water

log Pow = 0.53. Temperature:25 °C.

Vapour pressure

0 Pa. Temperature:25 °C. Remarks:5.36 E-008 mm Hg is equivalent to vapour pressure of 7.14 E-006 Pa.

Density and/or relative density

Ca. 2.2 g/cm³. Temperature:20 °C.

Relative vapour density

no data available

Particle characteristics

no data available

SECTION 10: Stability and reactivity


10.1

Reactivity

no data available


10.2

Chemical stability

no data available


10.3

Possibility of hazardous reactions

no data available


10.4

Conditions to avoid

no data available


10.5

Incompatible materials

no data available


10.6

Hazardous decomposition products

no data available

SECTION 11: Toxicological information

Acute toxicity

  • Oral: LD50 – rat (male/female) – > 5 000 mg/kg bw.
  • Inhalation: LC50 – rat (male/female) – > 0.14 mg/L air (analytical).
  • Dermal: LD50 – rabbit – > 5 000 mg/kg bw.

Skin corrosion/irritation

no data available

Serious eye damage/irritation

no data available

Respiratory or skin sensitization

no data available

Germ cell mutagenicity

no data available

Carcinogenicity

no data available

Reproductive toxicity

no data available

STOT-single exposure

no data available

STOT-repeated exposure

no data available

Aspiration hazard

no data available

SECTION 12: Ecological information


12.1

Toxicity

  • Toxicity to fish: LL0 – Danio rerio (previous name: Brachydanio rerio) – 10 000 mg/L – 96 h. Remarks:: 0/20 animals died.
  • Toxicity to daphnia and other aquatic invertebrates: EL50 – Daphnia magna – > 1 000 mg/L – 24 h. Remarks:: 1/40 animals were immobile (see Results table above).
  • Toxicity to algae: NOELR – Desmodesmus subspicatus (previous name: Scenedesmus subspicatus) – 10 000 mg/L – 72 h.
  • Toxicity to microorganisms: no data available


12.2

Persistence and degradability

no data available


12.3

Bioaccumulative potential

no data available


12.4

Mobility in soil

no data available


12.5

Other adverse effects

no data available

SECTION 13: Disposal considerations


13.1

Disposal methods

Product

The material can be disposed of by removal to
a licensed chemical destruction plant or by controlled incineration
with flue gas scrubbing. Do not contaminate water, foodstuffs,
feed or seed by storage or disposal. Do not discharge to sewer systems.

Contaminated packaging

Containers can be triply rinsed (or equivalent) and
offered for recycling or reconditioning.
Alternatively, the packaging can be punctured to
make it unusable for other purposes and then be disposed of
in a sanitary landfill. Controlled incineration
with flue gas scrubbing is possible for combustible packaging materials.

SECTION 14: Transport information


14.1

UN Number

ADR/RID: Not dangerous goods. (For reference only, please check.)IMDG: Not dangerous goods. (For reference only, please check.)IATA: Not dangerous goods. (For reference only, please check.)


14.2

UN Proper Shipping Name

ADR/RID: Not dangerous goods. (For reference only, please check.)IMDG: Not dangerous goods. (For reference only, please check.)IATA: Not dangerous goods. (For reference only, please check.)


14.3

Transport hazard class(es)

ADR/RID: Not dangerous goods. (For reference only, please check.)IMDG: Not dangerous goods. (For reference only, please check.)IATA: Not dangerous goods. (For reference only, please check.)


14.4

Packing group, if applicable

ADR/RID: Not dangerous goods. (For reference only, please check.)IMDG: Not dangerous goods. (For reference only, please check.)IATA: Not dangerous goods. (For reference only, please check.)


14.5

Environmental hazards

ADR/RID: NoIMDG: NoIATA: No


14.6

Special precautions for user

no data available


14.7

Transport in bulk according to IMO instruments

no data available

SECTION 15: Regulatory information


15.1

Safety, health and environmental regulations specific for the product in question

Chemical nameCommon names and synonymsCAS numberEC number
Silicon Oxide Sputtering Target7631-86-9231-545-4
European Inventory of Existing Commercial Chemical Substances (EINECS)Listed.
EC InventoryListed.
United States Toxic Substances Control Act (TSCA) InventoryListed.
China Catalog of Hazardous chemicals 2015Not Listed.
New Zealand Inventory of Chemicals (NZIoC)Listed.
Philippines Inventory of Chemicals and Chemical Substances
(PICCS)
Listed.
Vietnam National Chemical InventoryListed.
Chinese Chemical Inventory of Existing Chemical Substances (China
IECSC)
Listed.
Korea Existing Chemicals List (KECL)Listed.

SECTION 16: Other information

Information on revision

Creation DateOct 16, 2020
Revision DateOct 16, 2020

Abbreviations and acronyms

  • CAS: Chemical Abstracts Service
  • ADR: European Agreement concerning the International Carriage of Dangerous Goods by Road
  • RID: Regulation concerning the International Carriage of Dangerous Goods by Rail
  • IMDG: International Maritime Dangerous Goods
  • IATA: International Air Transportation Association
  • TWA: Time Weighted Average
  • STEL: Short term exposure limit
  • LC50: Lethal Concentration 50%
  • LD50: Lethal Dose 50%
  • EC50: Effective Concentration 50%

References

  • IPCS – The International Chemical Safety Cards (ICSC), website:
    http://www.ilo.org/dyn/icsc/showcard.home
  • HSDB – Hazardous Substances Data Bank, website: https://toxnet.nlm.nih.gov/newtoxnet/hsdb.htm
  • IARC – International Agency for Research on Cancer, website: http://www.iarc.fr/
  • eChemPortal – The Global Portal to Information on Chemical Substances by OECD, website:
    http://www.echemportal.org/echemportal/index?pageID=0&request_locale=en
  • CAMEO Chemicals, website: http://cameochemicals.noaa.gov/search/simple
  • ChemIDplus, website: http://chem.sis.nlm.nih.gov/chemidplus/chemidlite.jsp
  • ERG – Emergency Response Guidebook by U.S. Department of Transportation, website:
    http://www.phmsa.dot.gov/hazmat/library/erg
  • Germany GESTIS-database on hazard substance, website:
    http://www.dguv.de/ifa/gestis/gestis-stoffdatenbank/index-2.jsp
  • ECHA – European Chemicals Agency, website: https://echa.europa.eu/
Any questions regarding this SDS, Please send your inquiry to [email protected]

Disclaimer: The above information is believed to be correct but does not purport to be all inclusive and
shall be used only as a guide. The information in this document is based on the present state of our
knowledge and is applicable to the product with regard to appropriate safety precautions. It does not
represent any guarantee of the properties of the product. We as supplier shall not be held liable for any
damage resulting from handling or from contact with the above product.

Chemical Formular:O2Si
PubChem CID:24261
IUPAC Name:dioxosilane
Inchl:InChI=1S/O2Si/c1-3-2
InChI Key:VYPSYNLAJGMNEJ-UHFFFAOYSA-N
Canonical SMILES:O=[Si]=O
Pictogram(s):Globally Harmonized System of Classification
Signal:Warning
GHS Hazard Statements:H319-H335
Hazard Codes:Xi:Irritant
Risk Codes:R36/37
Precautionary Statement Codes:P261-P305 + P351 + P338
Flash Point:n/a

Silicon Dioxide
Quartz
silane
dioxo
Silicon (IV) Oxide

Cristobalite
Silica
Crystalline silica
Dioxosilane
Sand

SiliconSilicon is a chemical element with the symbol Si and atomic number 14.
It is a hard and brittle crystalline solid with a blue-grey metallic lustre; and it is a tetravalent metalloid and semiconductor.
It is a member of group 14 in the periodic table: carbon is above it; and germanium, tin, and lead are below it.

OxygenOxygen is the chemical element with the symbol O and atomic number 8, meaning its nucleus has 8 protons.
Oxygen is a member of the chalcogen group on the periodic table, a highly reactive nonmetal, and an oxidizing agent that readily forms oxides with most elements as well as with other compounds.
Dioxygen is used in cellular respiration and many major classes of organic molecules in living organisms contain oxygen, such as proteins, nucleic acids, carbohydrates, and fats, as do the major constituent inorganic compounds of animal shells, teeth, and bone.
Oxygen was isolated by Michael Sendivogius before 1604, but it is commonly believed that the element was discovered independently by Carl Wilhelm Scheele, in Uppsala, in 1773 or earlier, and Joseph Priestley in Wiltshire, in 1774.

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